Micromechanical accelerometer and method for the production thereof
CA 2116382 C · Owner: Hafen, Martin · Inventors: Ryrko, Bruno; Vetter, Egbert; Leinefelder, Peter
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
The high precision micromechanical accelerometer is produced as a layered structure in particular from five semiconductor wafers which are insulated from one another by thin semiconductor material oxide layers. The coverplate and the baseplate (1, 5) are first connected by bonding to an associated insulating plate (2 and 4 respectively). Subsequently, counter-electrodes (6 7), fixed to the coverplate and to the baseplate respectively, are produced by anisotropic etching from the respective insulating plate, said counter-electrodes being contactable via contact windows (10 and 11 respectively) through the cover or baseplate. A central wafer (3) contains the unilaterally linked mass (14) …
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Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Filed February 24, 1994 and granted August 18, 1998. A Canadian patent filed from October 1, 1989 lasts 20 years from filing, so its term ended February 24, 2014.
- A certificate of supplementary protection adds at most two years for a drug, so even that would have ended by February 24, 2016.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.