An evaporation system for gas jet deposition on thin film materials
CA 2107242 C · Owner: Schmitt, Jerome J. · Inventors: Schmitt, Jerome J.; Halpern, Bret L.
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
Thin films are deposited by generating film deposition vapors from solid film precursor materials including those in the form of powder in a crucible (42) or wires (38) positioned inside the cavity , (22) of one or more nozzles (20) and carrying the , vapors in a low pressure supersonic jet of inert gas to the surface (26) of a prepared substrate (28) where the vapors deposit to form a thin film, A microwave discharge plasma may be generated in the cavity (132) of one or more additional nozzles (130) into which a reactive gas is introduced, to form a supersonic jet of activated reactive gas carried in an inert gas. Motion of a substrate (82) relative to the nozzles (20, 130) permits a …
Read the whole patent
Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Filed June 21, 1991 and granted December 14, 1999. A Canadian patent filed from October 1, 1989 lasts 20 years from filing, so its term ended June 21, 2011.
- A certificate of supplementary protection adds at most two years for a drug, so even that would have ended by June 21, 2013.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.