Semiconductor type differential pressure measurement apparatus and method for manufacturing the same
CA 2105728 C · Owner: Yokogawa Electric Corporation · Inventors: Tsukamoto, Hideo; Kudo, Takahiro; Fukuhara, Satoshi
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
A semiconductor type differential pressure measurement apparatus comprising a measuring diaphragm whose periphery is fixed and two measuring chambers each having a predetermined spacing along both surfaces of said measuring diaphragm. The apparatus detects differential pressure within the allowable limit of measurement but when an overpressure is applied, the measuring diaphragm is directly backed up by the wall of the measuring chamber to prevent the diaphragm from being damaged by the overpressure. Accordingly the apparatus requires no additional protective mechanism against overpressure. The apparatus comprises an additional chamber accompanied by an overhang provided in such a manner …
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Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Filed September 8, 1993 and granted November 9, 1999. A Canadian patent filed from October 1, 1989 lasts 20 years from filing, so its term ended September 8, 2013.
- A certificate of supplementary protection adds at most two years for a drug, so even that would have ended by September 8, 2015.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
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Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.