Self-supporting zinc alloy rotating sputter target
CA 2103241 C · Owner: Hillendahl, James W. · Inventors: Palmer, J. Glen; Hillendahl, James W.
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
Alloys useful for preparing self-supporting cylindrical targets are provided. The alloys comprise zinc and other metals consisting of one or more of the following: aluminum, bismuth, cerium, gadolinium hafnium, niobium, silicon, tantalum, titanium vanadium, yttrium, and zirconium. In one preferred embodiment, a zinc alloy with approximately 2o aluminum forms self-supporting cylindrical target from which metal oxide films are prepared by reactive sputtering. The alloy oxide films are clear transparent, non-absorbing, and optically functional.
Read the whole patent
Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Filed May 20, 1992 and granted November 9, 1999. A Canadian patent filed from October 1, 1989 lasts 20 years from filing, so its term ended May 20, 2012.
- A certificate of supplementary protection adds at most two years for a drug, so even that would have ended by May 20, 2014.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.