Pressurized interface apparatus for transferring a semiconductor wafer between a pressurized sealable transportable container and a processing equipment
CA 2094436 C · Owner: Garric, Georges · Inventors: Lafond, Andre; Garric, Georges
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
A dual-port version of the pressurized interface apparatus consists of two independent IN/OUT sections (to match most conventional processing equipments provided with respective pre-process and post-process stations). The pressurized interface apparatus interfaces one container and a processing equipment. It includes a frame which essentially consists of a box-shaped housing provided with a rim at its rear face. Housing delineates an interior space common to the two IN and OUT sections. The front face of housing is provided with two port windows closed by respective port lids. Similarly, the rear face of the frame is provided with two corresponding communication gates for communicating with …
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Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Filed April 20, 1993 and granted October 27, 1998. A Canadian patent filed from October 1, 1989 lasts 20 years from filing, so its term ended April 20, 2013.
- A certificate of supplementary protection adds at most two years for a drug, so even that would have ended by April 20, 2015.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.