Arrangement for generating a plasma by means of cathode sputtering and microwave irradiation
CA 2092599 A1 · Owner: Latz, Rudolf · Inventors: Ritter, Jochen; Latz, Rudolf; Scherer, Michael
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
Title: Arrangement for generating a plasma by means of cathode sputtering and microwave irradiation, The invention relates to an arrangement for generating a plasma by means of cathode sputtering and microwave irradiation. Herein the dc and/or ac voltage (10) of a magnetron is connected to the cathode (9) and a microwave is irradiated into the region between the cathode (9) and a substrate (5). The irradiation of the microwave takes place in the region of the magnetic field (22, 23) of the magnetron wherein the magnetic field and the microwave are layed out so that an electron cyclotron resonance develops and the microwave is absorbed in the plasma. (Fig. 1).
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Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Filed March 26, 1993. No grant is recorded for it in Canada; had it been granted, its 20-year term would have ended March 26, 2013.
- A certificate of supplementary protection adds at most two years for a drug, so even that would have ended by March 26, 2015.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
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Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.