Shielding for arc suppression in rotating magnetron sputtering systems
CA 2089149 C · Owner: Tru Vue, Inc. · Inventors: Dickey, Eric R.; Bjornard, Erik J.
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
A cathode body (12) for a rotating cylindrical magnetron (10) wherein the magnetron provides a sputtering zone extending along the length of the cathode body (12) and circumferentially along a relatively narrow region thereof. The cathode body (12) includes an elongated tubular member (14) having a target material (16) at the outer surface thereof. A collar (32) of electricallyconductive material is located at at least one end of the tubular member (14) and extends along the tubular member (14) from that one end into the erosion zone. A sleeve of electrically-conductive material may extend circumferentially around the collar (32).
Read the whole patent
Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Filed July 31, 1991 and granted November 26, 2002. A Canadian patent filed from October 1, 1989 lasts 20 years from filing, so its term ended July 31, 2011.
- A certificate of supplementary protection adds at most two years for a drug, so even that would have ended by July 31, 2013.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.