Energy sensitive materials and methods for their use
CA 2085698 C · Owner: American Telephone And Telegraph Company · Inventors: Weidman, Timothy William; Joshi, Ajey Madhav
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
A class of silicon-containing materials display excellent sensitivity in the ultraviolet and deep ultraviolet for the formation of patterns by radiation induced conversion into glassy compounds. Materials are depositable from the vapor phaseand show excellent promise for use such as resists in the fabrication of electronic and optical devices.
Read the whole patent
Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Filed December 17, 1992 and granted June 8, 1999. A Canadian patent filed from October 1, 1989 lasts 20 years from filing, so its term ended December 17, 2012.
- A certificate of supplementary protection adds at most two years for a drug, so even that would have ended by December 17, 2014.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.