Method and apparatus for process control of material emitting radiation
CA 2085143 C · Owner: Kawasaki Steel Corporation · Inventors: Arai, Kazuo; Marui, Tomohiro
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
An apparatus for controlling a process in which a, control system is structured by having a direct desired value (for example the film thickness d) as the control target, with an emissivity power ratio Ku * (the .lambda. i power of .epsilon. 1/the .lambda. j power of .epsilon. 2) used as an indirect desired value, and a measured value of emissivity power ratio Ku obtainable from detection signals (Si (S1 S2, ...) of a, radiation sensor (160) used as an indirect controlled variable. A process manipulated variable (170) is automatically controlled in accordance with the direct desired value (actual film thickness) such that the indirect controlled variable attains an indirect desired value as …
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Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Filed December 11, 1992 and granted March 4, 1997. A Canadian patent filed from October 1, 1989 lasts 20 years from filing, so its term ended December 11, 2012.
- A certificate of supplementary protection adds at most two years for a drug, so even that would have ended by December 11, 2014.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
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Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.