Film deposition apparatus
CA 2084964 C · Owner: Nakamura, Takao · Inventors: Iiyama, Michitomo; Nakamura, Takao
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
A MBE film deposition apparatus comprises a vacuum chamber provided with a partition wall for dividing the vacuum chamber into a first sub-chamber and a second sub-chamber which are independently, provided with a main evacuating apparatus and a auxiliary evacuating apparatus, respectively. The partition wall including an opening for introducing a vacuum impedance for molecular flows between the first sub-chamber and the second sub-chamber so that a pressure difference can be created between the first sub-chamber and the second sub-chamber when the opening is open. A gate valve is provided on the partition wall for hermetically closing the opening of the partition wall so as to shut off the …
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Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Filed December 9, 1992 and granted February 17, 1998. A Canadian patent filed from October 1, 1989 lasts 20 years from filing, so its term ended December 9, 2012.
- A certificate of supplementary protection adds at most two years for a drug, so even that would have ended by December 9, 2014.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.