Apparatus for manufacturing semiconductor wafers
CA 2080028 C · Owner: Northern Telecom Limited · Inventors: Hillier, Glen Cameron; Becker, Jurgen
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
Apparatus for semiconductor wafer manufacture in which a susceptor has an annular rotor for supporting a wafer substrate with a substrate surface facing downwards. The rotor has an annular flange overlying a body of the susceptor and the structure is such that a flow of rotor driving gas may be directed up from the body and against the flange while crystalline layers are being formed on the undersurface of the substrate.
Read the whole patent
Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Filed October 7, 1992 and granted April 21, 1998. A Canadian patent filed from October 1, 1989 lasts 20 years from filing, so its term ended October 7, 2012.
- A certificate of supplementary protection adds at most two years for a drug, so even that would have ended by October 7, 2014.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.