X-ray exposure apparatus
CA 2079562 C · Owner: Ebinuma, Ryuichi · Inventors: Ebinuma, Ryuichi; Kasumi, Kazuyuki; Abe, Naoto
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
An X-ray apparatus is disclosed which, includes a mirror having a reflection surface for, expanding an X-ray beam in a predetermined direction a detecting device for detecting a relative positional relationship between the X-ray beam and the reflection surface with respect to a direction perpendicular to the reflection surface, and an adjusting device for adjusting the relative position of the X-ray beam and the reflection surface on the basis of the detection. Also disclosed is an exposure apparatus and a semiconductor device manufacturing method using the Xray apparatus.
Read the whole patent
Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Filed September 30, 1992 and granted January 7, 1997. A Canadian patent filed from October 1, 1989 lasts 20 years from filing, so its term ended September 30, 2012.
- A certificate of supplementary protection adds at most two years for a drug, so even that would have ended by September 30, 2014.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.