Rotating cylindrical magnetron structure for large area coating
CA 2069328 A1 · Owner: The Boc Group, Inc. · Inventors: Hoog, Josef T.; Boozenny, Alex
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
Mechanisms for supporting rotating, cooling and energizing a, cylindrical magnetron target structure (59 61) in a through, supports (65, 69) at each end of the target structure. Two specific configurations are described. Particular arrangements (72) of magnets are provided within the target cylinder. Two adjacent rotating target cylinders may optionally be employed in order to increase the rate of depositing sputtered material on a substrate. The various features of this invention are particularly adapted for a large-scale cylindrical magnetron used for sputtering coatings on architectural glass panels, automobile windshields and the like but are also advantageous for use in coating very …
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Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Filed November 7, 1990. No grant is recorded for it in Canada; had it been granted, its 20-year term would have ended November 7, 2010.
- A certificate of supplementary protection adds at most two years for a drug, so even that would have ended by November 7, 2012.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.