Improved process for preparing a layered structure containing at least one thin film of oxide superconductor

Abstract From the Canadian patent

A process for producing a layered structure containing at least one thin film of oxide superconductor (I) such as Y1Ba2Cu3O7-x having a contaminated surface on a substrate (3). The contaminated surface of the thin film of oxide superconductor is heat-treated in an atmosphere containing oxygen of high purity of higher than 5N and a partial pressure of 25 Torr at a temperature of 350 to 700 °C. On the thin film of oxide superconductor (1), another thin film (2) of oxide superconductor or non-superconductor is deposited. The resulting structure of layered thin films is used for fabricating superconducting transistor, Josephson junctions superconducting circuits, or the like.