Narrow band excimer laser
CA 2064207 A1 · Owner: Kowaka, Masahiko · Inventors: Wakabayshi, Osamu; Kobayashi, Yukio; Kowaka, Masahiko
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
A narrow-band oscillation excimer laser employing a diffraction grating as a wavelength selecting element which is particularly, suited for a light source of a reduction type projection aligner. The grating used in the narrow-band oscillation excimer laser of the invention is so disposed that the direction of grating lines is nearly perpendicular to the direction of laser discharge. When a beam expander is used to expand laser beam falling on the beam expander is so disposed that the direction of beam expansion is nearly perpendicular to that of discharge of the laser. Further when an aperture is to be used in the optical resonator the, aperture is placed so that the longitudinal …
Read the whole patent
Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Filed May 18, 1990. No grant is recorded for it in Canada; had it been granted, its 20-year term would have ended May 18, 2010.
- A certificate of supplementary protection adds at most two years for a drug, so even that would have ended by May 18, 2012.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.