High ratio planetary drive system for vacuum chamber
CA 2059094 C · Owner: Sonderman, John D. · Inventors: Sonderman, John D.; Seddon, Richard I.
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
A high ratio planetary drive system, a vacuum processing chamber system incorporating the planetary drive system, and a method of operating the system are disclosed. The planetary drive system provides relatively slow planetary workpiece rotation for effecting processing (deposition and reaction) of thin films, in particular optical thin, films, with complete film oxidation controlled film, uniformity, reduced bearing wear and reduced heat dissipation.
Read the whole patent
Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Filed January 9, 1992 and granted June 3, 1997. A Canadian patent filed from October 1, 1989 lasts 20 years from filing, so its term ended January 9, 2012.
- A certificate of supplementary protection adds at most two years for a drug, so even that would have ended by January 9, 2014.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.