Laser process apparatus
CA 2055899 C · Owner: Kohno, Hiroshi · Inventors: Orikasa, Tsuyoshi; Ichikawa, Fumio; Nishiwaki, Masayuki
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
In a laser process apparatus, a plurality of holes each having a predetermined shape are formed in a work upon radiation of light from an excimer laser. The apparatus is provided with a mask, in which a plurality of predetermined small holes are formed in correspondence with the plurality of holes to be formed in the work, and which allows laser light from said excimer laser to pass through said small holes thereof toward the work, a projection optical system for projecting optical images each having a predetermined shape onto the work through the small holes of said mask, a measurement optical system for measuring a work position, and a moving stage for moving the work on the basis of a …
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Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Filed November 20, 1991 and granted December 16, 1997. A Canadian patent filed from October 1, 1989 lasts 20 years from filing, so its term ended November 20, 2011.
- A certificate of supplementary protection adds at most two years for a drug, so even that would have ended by November 20, 2013.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.