Micro-displacement type information detection probe device and scanning tunneling microscope, atomic force microscope, information processing device by use thereof

Abstract From the Canadian patent

A micro-displacement type information, detection probe device capable of following all of the undulation on the µm order, etc. and the periodical surface unevenness on the nm order etc. of the recording medium or the substrate in performing recording, reproduction, etc. by use of tunnel current, etc. is provided. By forming a cantilever 701 of the first stage by extending the insulation layer laminated on the substrate providing a layer structure 708 - 710 having a piezoelectric material sandwiched between the electrode members on the cantilever of the first stage, forming further a cantilever 702 of the second stage on the extension from the tip end of the first cantilever having said …