Coatings for microelectronic devices and substrates
CA 2034908 A1 · Owner: Haluska, Loren A. · Inventors: Haluska, Loren A.; Haluska, Loren A.
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
The present invention relates to a method of forming a ceramic or ceramic-like coating on a substrate especially electronic devices, as well as the substrate coated thereby. The method comprises coating said substrate with a solution comprising a solvent, hydrogen silsesquioxane resin and a modifying ceramic oxide precursor selected from the group consisting of tantalum oxide precursors niobium, oxide precursors, vanadium oxide precursors phosphorous, oxide precursors and boron oxide precursors. The solvent is then evaporated to thereby deposit a preceramic coating on the substrate. The preceramic coating is then ceramified by heating to a temperature of between about 40°C. and about …
Read the whole patent
Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Filed January 24, 1991. No grant is recorded for it in Canada; had it been granted, its 20-year term would have ended January 24, 2011.
- A certificate of supplementary protection adds at most two years for a drug, so even that would have ended by January 24, 2013.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.