Capacitive pressure sensor and method of manufacturing same
CA 2028115 C · Owner: Frank, Manfred · Inventors: Frank, Manfred; Hegner, Frank
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
8-, This rugged, temperature-shock-insensitive and low-cost, pressure sensor (1) has a diaphragm (2) and a substrate (3) which are alumina-ceramic parts, preferably with a purity of 96%, are joined together in a defined spaced relationship and parallel to each other by means of an intermediate layer, forming a, preferably closed chamber, and have flat inner surfaces which are provided with at least one conductive layer for forming at least one capacitor and are electrically connected to the respective rear side of the diaphragm or substrate via through-hole coatings. For the conductive layers (6, 7, 8), the through-hole coatings (12 13, 14), and, the intermediate layer (5) use is made of a …
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Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Filed March 15, 1990 and granted May 19, 1998. A Canadian patent filed from October 1, 1989 lasts 20 years from filing, so its term ended March 15, 2010.
- A certificate of supplementary protection adds at most two years for a drug, so even that would have ended by March 15, 2012.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.