Microwave plasma generating apparatus and process for the preparation of diamond thin film utilizing same
CA 2026175 A1 · Owner: Itatani, Ryohei · Inventors: Fukumoto, Kazuyuki; Itatani, Ryohei
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
A microwave plasma generating apparatus for generating plasma by radiating microwave into a space in which electric discharge takes place contains a plurality of microwave radiating means for radiating a plurality of microwaves having different directions of electric fields from each other. This microwave plasma generating apparatus can produce a diamond thin film by exciting a carbon source gas supplied into the space and bringing the excited gas into contact with a substrate to be formed thereon with the diamond thin film, the substrate being disposed in the space in which the electric discharge is performed. This apparatus can produce a large volume of plasma in a stable fashion and as a …
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Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Filed September 25, 1990. No grant is recorded for it in Canada; had it been granted, its 20-year term would have ended September 25, 2010.
- A certificate of supplementary protection adds at most two years for a drug, so even that would have ended by September 25, 2012.
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Timeline
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Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.