Method to prevent backside growth on substrates in a vapor deposition system
CA 2023278 C · Owner: Taylor, Raymond L. · Inventors: Taylor, Raymond L.; Goela, Jitendra S.; Jaworski, Roy D.
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
A method of preventing backside growth on substrates in a vapor deposition system wherein the substrate (10) is mounted on a plurality of graphite pillars (16) with the pillars being bonded to the substrate as near theperiphery thereof as possible. A hollow body (14) open on one side but closed on the other, and fabricated from flexible graphite suitably with graphite cement used as a bonding agent is mounted on the pillars with the, open end facing the substrate. The open end of the hollow body is pressed against the substrate and sealed with a bonding agent. This completely covers the backside of the substrate and thus prevents any vapor deposition thereon. Vapor deposition occurs, …
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Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Filed August 15, 1990 and granted August 31, 1993. A Canadian patent filed from October 1, 1989 lasts 20 years from filing, so its term ended August 15, 2010.
- A certificate of supplementary protection adds at most two years for a drug, so even that would have ended by August 15, 2012.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
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Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.