Method of manufacturing active matrix display device using insulation layer formed by the ale method

Abstract From the Canadian patent

There is disclosed a method of manufacturing an active matrix display device, in which particular emphasis is laid on the forming step of an insulation layer by the ALE method. The insulation layer can be a gate insulation layer an inter-busline, insulation layer, a protection layer or an auxiliary capacitor insulation layer of the display device. The method of forming the insulation layer comprises a predetermined number of repeated cycles of the steps of subjecting a substrate to the vapor of a metal inorganic/organic compound, which can react with H2O and/or O2 and form the metal oxide, under molecular flow condition for the duration of depositing almost a single atomic layer and, next …