Coaxial cavity type, radiofrequency wave, plasma generating apparatus
CA 2010245 C · Owner: Board Of Trustees, A Constitutional Corporation Operating Michigan State University · Inventors: Asmussen, Jes
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
A coaxial radiofrequency wave plasma generating apparatus with an elongate metallic cavity (10) having a movable elongate coupling probe (16) mounted in line with an axis (a-a) of the cavity having a central coaxial conductor (11) and having a movable plate (12) for obtaining a mode of resonance of the radiofrequency wave in the cavity surrounding a chamber (14) for confining the plasma (100) is described. An end (11b) of the conductor is adjacent to the chamber and can optionally support a set of magnets (27). The apparatus is particularly useful for retrofitting existing vacuum sources (101) having small inlet ports (105) for plasma treatment using molecular beam epitaxy (MBE).
Read the whole patent
Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Filed February 16, 1990 and granted May 11, 1993. A Canadian patent filed from October 1, 1989 lasts 20 years from filing, so its term ended February 16, 2010.
- A certificate of supplementary protection adds at most two years for a drug, so even that would have ended by February 16, 2012.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.