Spin-on glass processing technique for the fabrication of semiconductor device
CA 2009518 C · Owner: Mitel Corporation · Inventors: Ouellet, Luc
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
A method of applying a spin-on glass layer to a substrate is disclosed wherein the spin-on glass is applied as a plurality of contiguous thin layers that together form a composite layer. Each thin layer is cured prior to the application of the next layer at a temperature of at least about 300°C, preferably 350°C, for a time sufficient to permit catalyst connection and substantially eliminate volatile residual solvents contained therein. In this way cracking in organic SOGs can be substantially eliminated and, beneficial results can also be achieved with quasi-organic SOGs.
Read the whole patent
Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Filed February 7, 1990 and granted October 17, 2000. A Canadian patent filed from October 1, 1989 lasts 20 years from filing, so its term ended February 7, 2010.
- A certificate of supplementary protection adds at most two years for a drug, so even that would have ended by February 7, 2012.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.