Probe unit, driving method thereof, and scanning device for detecting tunnel current having said probe unit
CA 2002187 C · Owner: Takamatsu, Osamu · Inventors: Kawase, Toshimitsu; Miyazaki, Toshihiko; Takamatsu, Osamu
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
A probe unit comprises a substrate a first, electrode formed on the substrate a bridge-shaped, flexible member formed in the substrate and insulated by a cavity from the first electrode, and a probe provided in contact with the flexible member. The flexible member is constituted of a laminate comprising a second electrode layer, an insulating layer, and a third electrode layer for applying a voltage the probe. The first electrode may be included in the flexible member. A piezoelectric layer is between the first electrode and the second electrode.
Read the whole patent
Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Filed November 3, 1989 and granted September 21, 1993. A Canadian patent filed from October 1, 1989 lasts 20 years from filing, so its term ended November 3, 2009.
- A certificate of supplementary protection adds at most two years for a drug, so even that would have ended by November 3, 2011.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.