Sputtered titanium oxynitride films
CA 1333270 C · Owner: Gillery, Frank Howard · Inventors: Gillery, Frank Howard
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
A titanium oxynitride film, and a method for its production are disclosed. A method for making a titanium oxynitride coated article comprises a. placing a substrate in a coating chamber; b. evacuating said chamber; c. providing an atmosphere comprising oxygen and nitrogen in said chamber; d. placing a titanium cathode in said chamber facing a surface of said substrate; e. sputtering said titanium cathode in said atmosphere comprising oxygen and nitrogen in said chamber thereby depositing a titanium oxynitride coating on said surface of said substrate. Other aspects of the invention are also disclosed as for instance coated articles comprising titanium oxynitride in combination with other …
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Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Granted November 29, 1994. A Canadian patent filed before October 1, 1989 lasted 17 years from grant, so its term ended November 29, 2011.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.