Molecular beam epitaxy apparatus
CA 1333039 C · Owner: Mushiage, Masato · Inventors: Mushiage, Masato; Ishida, Yuhji; Tanaka, Haruo
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
A molecular beam epitaxy apparatus according to the present invention comprises a growth chamber evacuatable to a ultra high vacuum, and a holder support arranged in the growth chamber for supporting a substrate holder. The growth chamber has a mounting portion which is provided with a vaporizer for a group V element as well as with other vaporizers for additional materials. The vaporizers respectively have emission openings directed toward the center of the holder supported by the holder support. The emission openings of the additional material vaporizers are respectively closable by closure devices whereas the, emission opening of the group V element is always held open.
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Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Granted November 15, 1994. A Canadian patent filed before October 1, 1989 lasted 17 years from grant, so its term ended November 15, 2011.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.