Method and apparatus for producing thin film of compound having large area
CA 1330548 C · Owner: Yazu, Shuji · Inventors: Harada, Keizo; Fujimori, Naoji; Jodai, Tetsuji
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
1, Abstract, The present invention is directed to a thin film of a compound having a large area continuously produced on a substrate by depositing elements constituting the compound from a target member onto the surface of the substrate by sputtering comprising the steps of: rotating a first target member having a flat surface disposed around an axis which crosses the surface and comprising elements of the preselected compound so that a first part of the surface of target member is positioned at a first sputtering position and another part of the first target member is positioned at a second sputtering position, at the position sputtering at, least one second target comprising at least one …
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Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Granted July 5, 1994. A Canadian patent filed before October 1, 1989 lasted 17 years from grant, so its term ended July 5, 2011.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
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Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.