Method for preparing thin film of superconductor
CA 1328844 C · Owner: Fujimori, Naoji · Inventors: Jodai, Tetsuji; Harada, Keizo; Yazu, Shuji
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
A method for preparing a thin film of superconductor on a substrate by sputtering. A target prepared by an oxide containing Ba, Y and Cu in atomic ratios Cu/Y of 2.5 to 3.5 and Ba/Y of 1.8 to 2.2 is employed to form a superconducting thin film on a substrate at a temperature of 600 to 800°C in an atmosphere having total gas pressure of 1 x 10-2 to 5 x 10-2 Torr. and containing Ar and O2 with an O2 content of 5 to 80 vol.%. The thin film thus formed is subjected to heat treatment at a temperature of 600 to 930°C for 1 to 30 hours. The thin film after the heat treatment is cooled at a rate not more than 4°C/min. The film forming surface of the substrate is prepared by the 1100) surface or the …
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Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Granted April 26, 1994. A Canadian patent filed before October 1, 1989 lasted 17 years from grant, so its term ended April 26, 2011.
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Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.