Negative resist compositions
CA 1325353 C · Owner: Frechet, Jean M. J. · Inventors: Willson, Carlton Grant; Frechet, Jean M. J.; Twieg, Robert James
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
of the Invention, NEGATIVE RESIST COMPOSITIONS Heat stable, negative resist compositions are provided for use, particularly in deep ultraviolet light x-ray and electron beams. The composition comprises an acid generating onium salt photoinitiator a source of, polyfunctional activated aromatic rings and a source of polyfunctional carbonium ions, with at least one of said sources being a polymer.
Read the whole patent
Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Granted December 21, 1993. A Canadian patent filed before October 1, 1989 lasted 17 years from grant, so its term ended December 21, 2010.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.