Method of treating surfaces of substrates with the aid of a plasma and a reactor for carrying out the method
CA 1324979 C · Owner: Kroesen, Gerardus Maria Wilhelmus · Inventors: Schram, Daniel Cornelis; Kroesen, Gerardus Maria Wilhelmus
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
A method of treating substrate surfaces with the aid of a plasma is described. The substrate is supported in a treatmentchamber to which a plasma is passed via a plasma-inlet from a plasma-generator. A reactant is introduced into the plasmagenerator and the pressure of the treatment-chamber is maintained lower than that of the plasma-generator. A flushing gas is passed into the plasma-generator upstream of the cathode in the generator and the reactant is fed downstream of the cathode after the flushing gas has passed the cathode. The flushing gas prevents contamination of the plasma by the cathode.
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Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Granted December 7, 1993. A Canadian patent filed before October 1, 1989 lasted 17 years from grant, so its term ended December 7, 2010.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.