Multilayer ceramic coatings from metal oxides and hydrogen silsesquioxane resin ceramified in ammonia
CA 1323529 C · Owner: Michael, Keith W. · Inventors: Haluska, Loren A.; Tarhay, Leo; Michael, Keith W.
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
Mixtures of hydrogen silsesquioxane resin and metal oxide precursors such as acyloxy and alkoxy compounds of aluminum, zirconium and titanium can be coated on substrates and subsequently ceramified at low temperature in the presence of ammonia, with or without platinum or rhodium catalysis, to form a nitrided ceramic coating on the surface of the substrate. The nitrided coatings produced are useful as interlevel dielectric films or for planarizing and protecting the surface of electronic devices. For further surface protection, overcoating the nitrided coating with an additional layer of a passivating ceramic material and a top layer of a barrier ceramic material is also described.
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Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Granted October 26, 1993. A Canadian patent filed before October 1, 1989 lasted 17 years from grant, so its term ended October 26, 2010.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.