Wafer handling system
CA 1321661 C · Owner: Svg Lithography Systems, Inc. · Inventors: Engelbrecht, Orest
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
Method and apparatus are disclosed for prealigning the transport stage of an automated wafer handling lithographic system. The wafer is first rotated and its displacement in X, Y, and O from a desire orientation is determined. The wafer chuck of the transport stage is then displaced by a compensating amount.
Read the whole patent
Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Granted August 24, 1993. A Canadian patent filed before October 1, 1989 lasted 17 years from grant, so its term ended August 24, 2010.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.