Apparatus for retaining wafers
CA 1320741 C · Owner: Brick, Robert V. · Inventors: Holt, Carl James Jr.; Mears, Eric Loring; Brick, Robert V.
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
21-, Abstract of the Disclosure, A device for releaseably holding a workpiece includes a resilient collet which is pivotally attached to a base. Several fingers for holding the workpiece extend from the collet. The fingers are pivoted by actuating a member which elastically deforms the collet and causes the fingers to pivot from a position for engaging the workpiece to a position for releasing the workpiece and vice-versa. In one application the base is a platen for, supporting a wafer in a semiconductor processing system and a plurality of such platens and a corresponding plurality of the holding devices are arranged around the periphery of the disk. A counterweight ring is attached to the …
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Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Granted July 27, 1993. A Canadian patent filed before October 1, 1989 lasted 17 years from grant, so its term ended July 27, 2010.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.