Use of alkylphosphines and alkylarsines in ion implantation
CA 1320105 C · Owner: American Cyanamid Company · Inventors: Ward, Jack Edward
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
30,602, USE OF ALKYLPHOSPHINES AND ALKYLARSINES IN ION IMPLANTATION, ABSTRACT OF THE DISCLOSURE Liquid alkylphosphines and alkylarsines are used as the ion source for improved ion implantation in the doping of semiconductor materials. A higher proportion of the total beam current is obtained as phosphorus and arsenic ion beam current in comparison with the use of gaseous phosphine and arsine, respectively as the ion, sources. Tertiarybutylphosphine and isobutylphosphine are the most preferred alkylphosphines, and tertiarybutylarsine is the most preferred alkylarsine for this use.
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Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Granted July 13, 1993. A Canadian patent filed before October 1, 1989 lasted 17 years from grant, so its term ended July 13, 2010.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
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Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.