Method of simultaneously measuring thickness and composition of film and apparatus therefor
CA 1320008 C · Owner: Kawabe, Junji · Inventors: Hashiguchi, Koichi; Kawabe, Junji
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
A film as being a subject to be measured is irradiated by an X-ray from a single X-ray source, whereby the intensity of the diffraction X-ray of a crystalline substance contained in the film and the intensity of the fluorescent X-ray of an element composing the film are simultaneously detected by at least two X-ray intensity detectors, respectively. so that the thickness and composition of the film at the same Position are simultaneously determined from the both detected values.
Read the whole patent
Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Granted July 6, 1993. A Canadian patent filed before October 1, 1989 lasted 17 years from grant, so its term ended July 6, 2010.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.