Dust-proof film
CA 1319043 C · Owner: Hitachi, Ltd. · Inventors: Takehana, Yoichi; Nakagawa, Hiroaki
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
A dust-proof film comprising a pellicle frame and a pellicle film spread on one side face of the frame which is attached to a photomask, a reticle or the like to prevent a foreign substance from adhering to a pattern, wherein a paint is coated on the inner side face of the pellicle frame to form a coating layer whereby a generation of dust from a surface of the pellicle frame is prevented.
Read the whole patent
Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Granted June 15, 1993. A Canadian patent filed before October 1, 1989 lasted 17 years from grant, so its term ended June 15, 2010.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.