Method of purifying and depositing group iiia and group va compounds to produce epitaxial films
CA 1318261 C · Owner: Eagle-Picher Industries, Inc. · Inventors: Potts, Thomas M.
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
METHOD OF PURIFYING AND DEPOSITING GROUP IIIa AND GROUP Va COMPOUNDS TO PRODUCE EPITAXIAL FILMS Abstract of the Disclosure, The invention relates to a method for purifying group IIIa and group Va compounds for deposition onto a substrate to produce epitaxial films. Prior art methods are unable to reproducibly produce quantities of high purity compounds. The present invention provides a method for obtaining quantities of group IIIa and group Va compounds having semi-conductor grade purity. Relatively crude group IIIa and group Va compounds are separated from impurities by conveying the mixture through separating columns (42,44, 110, 112). The isolated group IIIa or group Va compound is …
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Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Granted May 25, 1993. A Canadian patent filed before October 1, 1989 lasted 17 years from grant, so its term ended May 25, 2010.
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Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.