Process for purifying nitrogen trifluoride gas
CA 1318108 C · Owner: Mitsui Toatsu Chemicals, Inc. · Inventors: Harada, Isao; Hokonohara, Hisashi; Yamaguchi, Toshiaki
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
A process is provided herein which can effectively decompose dinitrogen difluoride present in nitrogen trifluoride gas to remove it from the gas. This process for purifying the nitrogen trifluoride gas includes the step of heating the nitrogen trifluoride gas containing at least: dinitrogen difluoride as an impurity at a temperature of 150 to 600°C in a metallic vessel. The inner wall of that metallic vessel has been previously lined with a compressed mold, a sintered mold or a fused mold of a solid fluoride, e.g. at least one component which is a of fluoride of metals in Groups IA, IIA and IIIA of the Periodic Table mixtures thereof and double salts thereof. The compressed mold the …
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Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Granted May 25, 1993. A Canadian patent filed before October 1, 1989 lasted 17 years from grant, so its term ended May 25, 2010.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
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Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.