Multilayer ceramics coatings from the ceramification of hydrogen silsesquioxane resin in the presence of ammonia
CA 1317822 C · Owner: Tarhay, Leo · Inventors: Haluska, Loren A.; Tarhay, Leo; Michael, Keith W.
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
Hydrogen silsesquioxane resin can be ceramified at low temperature in the presence of ammonia with or without, platinum or rhodium catalysis to form a ceramic coating on, the surface of a substrate. The nitrided silica coatings produced are useful as interlevel dielectric films or for planarizing and protecting the surface of electronic devices. For further surface protection overcoating the nitrided, silica with an additional layer of a passivating ceramic material and a top layer of a barrier ceramic material is also described.
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Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Granted May 18, 1993. A Canadian patent filed before October 1, 1989 lasted 17 years from grant, so its term ended May 18, 2010.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.