Expired Canadian patentCanada
Low stress polysilicon microstructures
CA 1312964 C · Owner: Wilcoxen, Duane T. · Inventors: Wilcoxen, Duane T.
Overview
Drawings and full text
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
Method for relieving stress in silicon microstructures by forming a silicide on the microstructures. Sensors comprising a stress-relieved silicon microstructure are also described.
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Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Granted January 19, 1993. A Canadian patent filed before October 1, 1989 lasted 17 years from grant, so its term ended January 19, 2010.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
FiledAugust 18, 1989
GrantedJanuary 19, 1993
Term endedJanuary 19, 2010
Patent numberCA 1312964 C
Classification (IPC)H01L21/31 +2 more
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.