Method of producing a superconductive oxide layer on a substrate

Abstract From the Canadian patent

Abstract, A method of forming a superconductive metal oxide film on a substrate is disclosed. The method comprises depositing a metal layer on the substrate and heat treating the metal layer in an oxygen-containing atmosphere such that the oxide film is formed therefrom. The metal layer is deposited such that it is substantially free of reactive constituents e.g. oxygen and/or fluorine, and such that it contains all the metal constituents that are to be contained in the oxide film. Advantageously, the metal layer is deposited such that the various metal constituents (e.g. Y, Ba, and Cu) are substantially mixed. The inventive method simplifies deposition control since the densities of the …