Reactor system and method for forming uniformly large diameter polycrystalline rods by the pyrolysis of silane

Abstract From the Canadian patent

In the reactor vessel in which silicon is deposited upon, a plurality of heated filament silicon starter rods vertically disposed within the reactor each filament rod is confined within a elongated chamber, extending vertically within each chamber having an open bottom end and a longitudinal axis substantially concentric with the rod. Exhausted gas from the vessel is recycled to filter out silicon powder. The recycled gas is fed separately into each chamber from the bottom end thereof with the recycled gas being substantially directed at the longitudinal axis of the chamber. Such recycle of the gas produces uniform polycrystalline growth of high-quality surface morphology. The method and …