Cathode and target design for a sputter coating apparatus

Abstract From the Canadian patent

An improved cathode and sputtering target design for sputter coaling, permitting operation with larger cathodes and at higher power levels than heretofore possible. The cathode and target assembly includes a cathode body a target holder, and a sputtering target. The cathode body function as a magnetic pole piece, a portion of the cooling system and a, mechanical stabilizer for the target. The target holder also provides cooling, by means of cooling passages and by intermeshing cooling means in contact with the target. The sputtering target has an arch-like face that promotes a controlled plastic deformation in a preselected direction so, that heat-induced expansion during operation results …