Surface grinding machine
CA 1307116 C · Owner: Nishiguchi, Masanori · Inventors: Miyoshi, Ikkei; Nishio, Kiyoshi; Nishiguchi, Masanori
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
A surface grinding-machine comprises a wheel head vertically movably supported; a cup-shaped diamond wheel supported by a rotatable wheel shaft at one end of the wheel head and having an abrasive grain layer of Young's modulus (10 - 15) x 104 kgf/cm2 at the lower end of the wheel; a wheel shaft driving motor for rotating the cupshaped diamond wheel supported by the wheel head; a servomotor for vertically moving the wheel head; a suitable number of chuck tables for fixing the surface of a III-V group compound semiconductor wafer on which elements have been fabricated; an index table for rotatably supporting the chuck tables a chuck table driving motor for turning the chuck tables; a main …
Read the whole patent
Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Granted September 8, 1992. A Canadian patent filed before October 1, 1989 lasted 17 years from grant, so its term ended September 8, 2009.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.