Method and apparatus for handling and processing wafer-like materials
CA 1300357 C · Owner: Materials Research Corporation · Inventors: Eror, Miroslav; Biehl, Richard E.
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
An apparatus and method for moving a plurality of wafer-like articles such as semiconductor substrates back and forth between a carrier and a processing chamber maintained in an interior atmosphere isolated from that of the carrier. A translating arm pivotal about its center with a wafer engaging vacuum chuck at each end loads and retrieves articles from the carrier and exchanges articles at a support. The support centers an article thereon and translates it linearly to or from a load lock chamber. The chamber opens and closes about the article on the support to maintain isolation of the environments as the article passes therebetween. Within the interior atmosphere of the chamber, another …
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Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Granted May 12, 1992. A Canadian patent filed before October 1, 1989 lasted 17 years from grant, so its term ended May 12, 2009.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.