Reticle frame assembly
CA 1297598 C · Owner: Laganza, Joseph L. · Inventors: Laganza, Joseph L.; Engelbrecht, Orest
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
A frame for a reticle or mask used in making integrated circuits, and capable of precisely positioning and holding a reticle in the X, Y and Z axis with a minimum of bending comprises a frame, and alignment device mounted on said frame for positioning the reticle along the Z-axis, and a further device for adjustably positioning the reticle along the Y-axis. A Y-axis transversly compliant axial loading spring's mounted on said frame opposite the Y-axis adjusting device. Also provided is an X-axis adjusting device, mounted on said frame for adjustably positioning the reticle along the X-axis and, an X-axis transversly compliant axial loading spring mounted on said frame opposite said X-axis …
Read the whole patent
Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Granted March 17, 1992. A Canadian patent filed before October 1, 1989 lasted 17 years from grant, so its term ended March 17, 2009.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.