Quad processor
CA 1283174 C · Owner: Applied Materials, Inc. · Inventors: Napoli, Joseph D.; Miller, Mark W.; Zafiropoulo, Arthur W.
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
Plural plasma etching vessels and a wafer queuing station are arrayed with a wafer transfer arm in a controlled environment. Wafer processing in each vessel is regulated by a state controller for processing a plurality of wafers from a single cassette contained within the vacuum environment of the plural plasma etching vessels and wafer queuing station to provide an orderly, and efficient throughput of wafers for diverse or similar processing in the plural vessels. In this manner a wafer can be processed as soon as a vessel becomes available.
Read the whole patent
Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Granted April 16, 1991. A Canadian patent filed before October 1, 1989 lasted 17 years from grant, so its term ended April 16, 2008.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.