Treatment of reaction gases by radio frequency plasma
CA 1282732 C · Owner: Danisch, Lee Allen · Inventors: Wallingford, Errol Elwood; Danisch, Lee Allen; Jenkins, George Miles
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
Abstract of the Disclosure, Reaction gas or gases from a reaction chamber are fed through a post-reaction chamber. An RF plasma is formed in the postreaction chamber and the reaction gas or gases pass through the plasma. Residual products are deposited on an internal surface or surfaces, in the, post-reaction chamber. The post-reaction chamber is preferably positioned before the vacuum pump extracting the gas or gases from the reaction chamber. -i-
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Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Granted April 9, 1991. A Canadian patent filed before October 1, 1989 lasted 17 years from grant, so its term ended April 9, 2008.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.